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© SPM&RS Centre 2022

Ultrahigh Vacuum Scanning
Probe Microscope JSPM-4610


Since its invention in 1982 Scanning Probe Microscope (SPM) confidently holds an important position in surface science. Nowadays it is an essential instrument for surface investigation. Along with this the need for clean sample surface by observation using SPM has grown up and high vacuum environment is necessary to ensure clean sample surface for imaging.

High Vacuum Scanning Probe Microscope (HVSPM) designed by JEOL Corporation is the instrument showing maximal opportunities for surface analysis. When creating this scientific instrument JEOL Corporation has used its many years' experience in manufacturing of scientific instruments .


JSPM-4610 specifications


Horizontal 0.14nm(STM) Atomic:resolution(AFM)
Vertical 0.01nm(STM) Atomic:resolution(AFM)

Mechanical movements

Driven by motors

Z movement (approach function)

Coarsely controls tip-specimen distance.

Auto approach mechanism


X and Y movenets (specimen shift function)

Movement ranges

X and Y: 4 nm (±2 nm)(STM)
X and Y: 2 nm (±1 nm)(AFM)

Center position indicator




Stack share (STM). Tube (AFM)

Maximum movements

X and Y: 0.2µm (200nm), Z: 0.6 µm (STM)
X and Y: 10µm, Z:3µm (AFM)

Scan rotation

Provided (-180 to + 180°)

Scan speed

Scan step

1.7 ms to 10 s/Line (16 steps)

Scan range

Variabe range

0 to 200 nm (Variable in 12-bit step)

Zoom finction



Number of specimens per load

One (MGL is used for specimen exchange)

Specimen size

10mm ? 10mm ? 5mm max.
1mm ? 7mm ? 0.3mm for heating specimen holder

Specimen heating mechanism

Heating method

Direct heating by specimen resistance

Heating temperature

R.T. (room temperature) to 1200°C or more


Number of tips/load

One (MGL is used for tip exchange)


W (tungsten)

Tip cleaning

High bias functions is used


System drift

0.05 nm/s or less (at R.T. and high temperature)

Signal detection

STM (Scanning tunneling mocroscopy) mode
Constant current mode/variable current mode

STS (Scanning Tunneling Spectroscopy) mode

Tunneling current

30pA to 1µA

Bias voltage

Variable range

0 to ±10V

Chamber construction

Three-chamber construction (3 chambers are evacuated independently)

UHV SPM chamber

For STM stage installation, etc.

Ultimate pressure

3 x 10-8 Pa or less

Specimen treatment chamber

For specimen treatment, and tip and specimen parking

Ultimate pressure

Approx. 10-7 Pa

Specimen airlock

For tip and specimen exchange

Ultimate pressure

Approx. 10-4 Pa

Bakeout heater


Vibration isolation devices

Air suspension

Gimbal poston suspension type

Stacking method

3-stage 4-top-hat type

Computer control system (CCS)

Computer system

Compatible with IBM PC/AT

Image processing system

Frame memory size

512 ? 512 ? 8 bits ? 2 frames

AD and DA converters

High speed 16-bit

Image display

High resolution color CRT

Control software

Scan Menu/setting of SPM mode parameters/setting of X, Y, Z scan speed/SPM Tip Menu

Image processing software

More than 100 types

Nuclear Magnetic Resonance spectrometer Bruker AVANCE 400

Multi-functional nuclear magnetic resonance spectrometer is designed for structural and dynamic researches at the nanoscale in solids, including both inorganic and organic materials, as well as for study of liquid-phase systems, for study of molecules and molecular systems structure and properties, dynamics of intra-intermolecular exchange processes, reactivity of new classes of organic, organometallic compounds and polymers in solution.


  • nuclear magnetic resonance (nuclei of majority chemical elements isotopes, temperature range 77-2000 K, the pulse frequency range up to 20 MHz)
  • NMR relaxation
  • nuclear quadrupole resonance (nuclei with J> 1)


The base of SPM&RS Center is composed of: ultrahigh-vacuum scanning probe microscope, NMR and EPR spectrometers, optical microscope, magnetron sputtering unit, high-precision analytical balance, derivatograph, single-beam UV-spectrophotometer, freeze-dryer. This equipment was developed and produced by the pre-eminent manufacturers of vacuum and analytical equipment and is certified, that is the necessary requirement when buying analytical equipment.

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