Ultrahigh Vacuum Scanning Probe Microscope
Since its invention in 1982 Scanning Probe Microscope (SPM) confidently holds an important position in surface science. Nowadays it is an essential instrument for surface investigation. Along with this the need for clean sample surface by observation using SPM has grown up and high vacuum environment is necessary to ensure clean sample surface for imaging. High Vacuum Scanning Probe Microscope (HVSPM) designed by JEOL Corporation is the instrument showing maximal opportunities for surface analysis. When creating this scientific instrument JEOL Corporation has used its many years' experience in manufacturing of scientific instruments .
Specification JSPM-4610
| Resolution | |
|---|---|
| Horizontal | 0.14 nm (STM) Atomic resolution (AFM) |
| Vertical | 0.01 nm (STM) Atomic resolution (AFM) |
| Mechanical movements (Driven by motors) | |
| Z movement (approach function): | Coarsely controls tip-specimen distance. |
| Auto approach mechanism | Built-in |
| X and Y movements (specimen shift function)Movement ranges | X and Y: 4 mm (±2 mm) (STM)
X and Y: 2 mm (±1 mm) (AFM) |
| Center position indicator | Buillt-in |
| Scanner | |
| Type | Stack share (STM). Tube (AFM) |
| Maximum movements | X and Y: 0.2 µm (200 nm), Z: 0.6 µm (STM)
X and Y: 10 µm, Z: 2.7 µm (AFM) |
| Scan rotation | Provided (–180 to +180°) |
| Scan range | |
| Variable range | 0 to 200 nm (variable in 12-bit step) (STM)
0 to 10 µm (variable in 12-bit step) (AFM) |
| Zoom function | Provided |
| Specimen | |
| Number of specimens per load | One (MGL is used for specimen exchange) |
| Specimen size | 10mm×10mm×5mm (t) max.(STM)
8mm×7.7mm×2mm (t) max.(AFM) 1mm×7mm×0.3mm (t) for heating |
| Specimen heating mechanism | |
| Heating method | Direct heating by specimen resistance |
| Heating temperature | R.T. (room temperature) to 1200°C or more |
| Drift | |
| System drift | 0.05 nm/s or less (at R.T. and high temperature) |
| Specimen treatment chamber | For specimen treatment, and tip and specimen parking |
| Ultimate pressure | Approx. 10 –7Pa |
| Specimen airlock | For tip and specimen exchange |
| Ultimate pressure | Approx. 10 –4Pa |
| Bakeout heater | Buillt-in |
